SOC晶片製程與產能
|
ITEM |
||
|---|---|---|
| Furnace | 12 sets | 100K pcs/M |
| LPCVD | 8 sets | Junction |
| Passivation | ||
| Chemical Hood | 20 sets | 100K pcs/M |
| FAB Class | Yes | Class 1000 |
| Area | Yes | 800M² |
| ITEM | ||
|---|---|---|
| Auto Aligner | 1 set | 10K pcs/M |
| Manual Aligner | 6 sets | 50K pcs/M |
| Auto Coater | 2 sets | 50K pcs/M |
| Manual Coater | 3 sets | 10K pcs/M |
| Developer | 2 sets | 60K pcs/M |
| Photo Class | Yes | Class 100 |
| ITEM | |
|---|---|
| 4 Point Prober | 2 sets |
| Curve Tracer | 4 sets |
| Nanospec | 1 set |
| Prober | 1 set |
| Digital Inspector | 2 sets |